Aluminum nitride. Preparation methods
نویسندگان
چکیده
منابع مشابه
Preparation and Characterization of Aluminum Nitride Thin Films with the Potential Application in Electro-Acoustic Devices
In this work, aluminum nitride (AlN) thin films with different thicknesses were deposited on quartz and silicon substrates using single ion beam sputtering technique. The physical and chemical properties of prepared films were investigated by different characterization technique. X-ray diffraction (XRD) spectra revealed that all of the deposited films have an amorphous str...
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Motivated by the recent successful synthesis of a new nanocarbon, namely, a warped, double-concave graphene "Pringle" (Nat. Chem., 2013, 5, 739), we investigate properties of warped boron-nitride (BN) and aluminum-nitride (AlN) analogues, i.e., the non-planar B40N40H30 and Al40N40H30 "Pringles" using density functional theory (DFT) calculations. Particular attention is placed on the effect of n...
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A combined wet and dry cleaning process for GaN(0001) has been investigated with XPS and DFT-MD modeling to determine the molecular-level mechanisms for cleaning and the subsequent nucleation of gate oxide atomic layer deposition (ALD). In situ XPS studies show that for the wet sulfur treatment on GaN(0001), sulfur desorbs at room temperature in vacuum prior to gate oxide deposition. Angle reso...
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Air-coupled piezoelectric micromachined ultrasound transducer arrays, operating at ~190 kHz, have been fabricated utilizing an aluminum nitride piezoelectric layer. Improved fabrication processes have reduced the frequency variation seen in our previous work with single transducers resulting in arrays of transducers with resonant frequencies (fn) that match within the fractional half-power band...
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ژورنال
عنوان ژورنال: Refractories and Industrial Ceramics
سال: 2013
ISSN: 1083-4877,1573-9139
DOI: 10.1007/s11148-013-9546-2